scia Coat 500

scia Coat 500 High uniformity multilayer coatings on large area optics

scia Coat 500
High uniformity multilayer coatings on large area optics

Dual Ion Beam Deposition (DIBD)

The scia Coat 500 is designed for homogeneous coating of high precision optics. Typical applications of the system are multilayer films for X-ray mirrors and filter coatings.

The scia Coat 500 applies a beam from a linear ion beam source onto a rectangular sputter target. This linear geometry provides a good homogeneity of the deposited film in one dimension. Meanwhile, the sample is moved on a linear axis in a direction perpendicular to the beam’s profile, thereby contributing to homogeneity or defined gradients of the coating in the second dimension.

In addition the sample stage is equipped with a spin rotation and a changeable shaper system (up to 4 shapers) in front of the sample stage.


Features

  • Superposition of substrate rotation and linear movement
  • Aperture technique e.g. for lateral layer thickness distribution and material-dependent homogenization
  • Rectangular sputter and assist ion beam sources
  • Primary ion source with concave grid for focused linear ion profile on the target
  • Secondary ion source for pre-cleaning and assist during deposition
  • Up to 6 water cooled target materials on a rotational holder
  • Additional tilt of target surface
  • Very short coating times are precisely controllable e.g. for thin barrier layers

Principle of Operation

scia Coat 500 Principle of Operation

scia Coat 500
Principle of Operation


Applications

  • Multilayer films for X-ray mirrors
  • Gradient coatings (e.g. Göbel-mirrors)
  • Synchrotron mirrors
  • Antireflective coatings
  • Optical filters
  • Ion beam smoothing
  • One-dimensional ion beam figuring

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