scia Systems was founded 2013 and is located in Chemnitz, Germany. The company manufactures advanced ion beam and plasma processing equipment for the production of microelectronics, MEMS and precision optical components, in both high volume production as well as research and development applications. scia Systems provides highly reliable tools together with a superior technology support. The process systems address the entire spectrum of ion beam and plasma technology, and are available with special source arrangements. The platforms accommodate all standard wafer sizes and may be customized to handle workpieces in a wide range of sizes. The tools are flexible and modular in design, allowing several vacuum process chambers to be combined into cluster or in-line solutions, according to customer-specific requirements.
scia Systems Products
Ion Beam Trimming (IBT) system for localized trimming, polishing, and planarization.
Ion Beam Etching (IBE) system for etching and milling.
Ion Beam Milling (IBM) system applicable for the structuring of metal films for MEMS and sensors, up to 200 mm diameter substrates.
Physical Vapor Deposition (PVD) system for deposition of metals, oxides, nitrides on up to 200mm substrates.
Large area high density plasma processes of substrates up to 750mm x 750mm.
Dual Ion Beam Deposition (DIBD) systems designed for coating of 200mm substates.
Dual Ion Beam Deposition (DIBD) designed for homogeneous coating of high precision optics.
Plasma Enhanced Chemical Vapor Deposition (PECVD) designed for homogeneous coating of 3-dimensional shaped substrates in one batch.
company website: scia Systems GmbH
Contact Us for more information