scia Systems GmbH


scia Systems was founded 2013 and is located in Chemnitz, Germany. The company manufactures advanced ion beam and plasma processing equipment for the production of microelectronics, MEMS and precision optical components, in both high volume production as well as research and development applications.  scia Systems provides highly reliable tools together with a superior technology support. The process systems address the entire spectrum of ion beam and plasma technology, and are available with special source arrangements.   The platforms accommodate all standard wafer sizes and may be customized to handle workpieces in a wide range of sizes.  The tools are flexible and modular in design, allowing several vacuum process chambers to be combined into cluster or in-line solutions, according to customer-specific requirements.

scia Systems Products

scia Trim 200

Ion Beam Trimming (IBT) system for localized trimming, polishing, and planarization.


scia Mill 150

 Ion Beam Etching (IBE) system for etching and milling.


scia Mill 200 Cluster scia-Mill-200-Cluster

Ion Beam Milling (IBM) system applicable for the structuring of metal films for MEMS and sensors, up to 200 mm diameter substrates.


scia Magna 200 scia-Magna-200

Physical Vapor Deposition (PVD) system for deposition of metals, oxides, nitrides on up to 200mm substrates.


scia Cube 750scia-Cube-750

Large area high density plasma processes of substrates up to 750mm x 750mm.

scia Coat 200 scia-Coat-200.sigle-load-lock

Dual Ion Beam Deposition (DIBD) systems designed for coating of 200mm substates.

scia Coat 500 scia-Coat-500

Dual Ion Beam Deposition (DIBD) designed for homogeneous coating of high precision optics.

scia Batch 350 scia-Batch-350

Plasma Enhanced Chemical Vapor Deposition (PECVD) designed for homogeneous coating of 3-dimensional shaped substrates in one batch.


company website:  scia Systems GmbH

contact-us-icon 100

Contact Us for more information